Fabrication of Free-space MOEM Component by CMOS Process

Ying-Chou  Cheng; Chi-Yuan Lee; Ching-Liang Dai; Wen-Jong  Chen; Pei-Zen Chang; Ping-Hei  Chen

doi:10.6180/jase.2004.7.2.03

Fabrication of Free-space MOEM Component by CMOS Process

Ying-Chou Cheng ¹, Chi-Yuan Lee¹ , Ching-Liang Dai² , Wen-Jong Chen¹ , Pei-Zen Chang³ and Ping-Hei Chen¹

¹Department of Mechanical Engineering National Taiwan University Taipei, Taiwan 106, R.O.C
²Department of Mechanical Engineering National Chung Hsing University Taichung, Taiwan 402, R.O.C
³Institute of Applied Mechanics National Taiwan University Taipei, Taiwan 106, R.O.C

Received: December 25, 2003
Accepted: January 17, 2004
Publication Date: June 1, 2004

Download Citation: ||https://doi.org/10.6180/jase.2004.7.2.03

ABSTRACT

This work presents the micro-mirror switch array for use on free-space optical interconnect platform which integrated with a digital 1×8 de-multiplexer on-chip control circuit together. The device employs electrostatic actuation for light beam directions control. The diameter of each mirror is about 50 µm and the overall chip size is around 1.8 by 1.8 mm. The professional simulation software was utilized to validate the micro-mirror design and elucidate the behavior of the micromirror before fabrication. Also described herein are the general principles of the light-beam switching method, the detailed device design, the post-CMOS fabrication process flow, the result of simulations and preliminary experimental results.

Keywords: MEMS, CMOS-MEMS, Foundry Service

REFERENCES

[1] Giles, C. R., Aksyuk, V., Barber, B., Ruel, R., Stulz, L. and Bishop, D., “A Silicon MEMS Optical Switch Attenuator and Its Use in Lightwave Subsystems,” Selected Topics in Quantum Electronics, IEEE Journal on, Vol. 5, pp. 18-25 (1999).
[2] Lin, L. Y. and Goldstein, E. L., “MEMS for Free-Space Optical Switching,” LEOS '99, IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting on, Vol. 2, pp. 483-484 (1999).
[3] Helin, P., Mita, M. and Fujita, H., “Selfaligned Mirror and V-grooves in Freespace Micromachined Optical Switches,” Electronics Letters, Vol. 36, pp. 563-564 (2000).
[4] Shen, G., Cheng, T. H., Bose, S. K., Lu, C. and Chai, T. Y., “Architectural Design for Multistage 2-D MEMS Optical Switches,” Journal of Lightwave Technology, pp. 1-10 (2002).