Real-time Observation for the Formation of Microlens Arrays Fabricated Using Thermal Reflow Process

Mao-Kuo Wei; I-Ling  Su; Ming-Chang Jung; Kai-Wen  Huang

doi:10.6180/jase.2004.7.2.05

Real-time Observation for the Formation of Microlens Arrays Fabricated Using Thermal Reflow Process

Mao-Kuo Wei ¹, I-Ling Su² , Ming-Chang Jung¹ and Kai-Wen Huang¹

¹Institute of Materials Science and Engineering National Dong Hwa University Shoufeng, Taiwan 974, R.O.C.
²Institute of Mechanical Engineering Chung Yuan Christian University Chungli, Taiwan 320, R.O.C.

Received: January 14, 2004
Accepted: February 11, 2004
Publication Date: June 1, 2004

Download Citation: ||https://doi.org/10.6180/jase.2004.7.2.05

ABSTRACT

A real-time monitoring system for the spherical microlens formation has been demonstrated. The geometrical shape of the photoresist structure during thermal flow process could be interpreted by the recorded images. Additionally, the thermal reflow mechanism for the rectangular photoresist plate has also been proposed.

Keywords: Microlens, Real-time Monitor, Thermal Reflow

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