Kuai-Kai Chang 1, Nang-Chian Shie1, Hung-Ming Tai1 and Tsan-Lin Chen1
1Center for Measurement Standards Industrial Technology Research Institute Hsinchu, Taiwan 300, R.O.C.
Received:
January 15, 2004
Accepted:
February 17, 2004
Publication Date:
June 1, 2004
Download Citation:
||https://doi.org/10.6180/jase.2004.7.2.07
ABSTRACT
The operation of a micro force-balancing force sensor with nN resolution is described. The system consists of a lever supported by torsion bars, a force controller, two electrostatic force actuators and two optic-fiber interferometers. The rotation of the lever is detected by the optic-fiber interferometers, and the lever returns its neutral position by using electrostatic -force feedback control system. The design of the force sensor and the minimum measurable range of the force sensor were analyzed by calculating force constants of torsion bars. A displacement of the lever with noise of 5 nm was obtained.
Keywords:
Force-balancing Force Sensor, Optic-fiber Interferometers
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