Journal of Applied Science and Engineering

Published by Tamkang University Press


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Kuai-Kai Chang This email address is being protected from spambots. You need JavaScript enabled to view it.1, Nang-Chian Shie1, Hung-Ming Tai1 and Tsan-Lin Chen1

1Center for Measurement Standards Industrial Technology Research Institute Hsinchu, Taiwan 300, R.O.C.


Received: January 15, 2004
Accepted: February 17, 2004
Publication Date: June 1, 2004

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The operation of a micro force-balancing force sensor with nN resolution is described. The system consists of a lever supported by torsion bars, a force controller, two electrostatic force actuators and two optic-fiber interferometers. The rotation of the lever is detected by the optic-fiber interferometers, and the lever returns its neutral position by using electrostatic -force feedback control system. The design of the force sensor and the minimum measurable range of the force sensor were analyzed by calculating force constants of torsion bars. A displacement of the lever with noise of 5 nm was obtained.

Keywords: Force-balancing Force Sensor, Optic-fiber Interferometers


  1. [1] Binning, G., Quate, C. F. and Gerber, C., “Single Three Dimensional Scanner for Scanning Tunneling Microscopy,” Rev. Sci. Instrum., Vol. 57, pp. 1688-1689 (1986).
  2. [2] Yamamoto, T., Kasamatsu, Y. and Hyodo, H., “Advanced Stiction-free Slider and DLC Overcoat,” Fujitsu Sci. Tech. J., Vol. 37, pp. 201-211 (2001).
  3. [3] Tsujimoto, K., Tsuji, S., Takatsuji, H., Kuroda, K., Saka, H. and Suzuki, Y., “Nanostructural Investigation of Whiskers and Hillocks of Al-based Metallization in Thin-film Tran- sistor Liquid Crystal Displays,” AIP Conf. Proc. 418, Vol. 418, pp. 395-400 (2000).
  4. [4] Joyce, S. A. and Houston, J. E. “A New Force Sensor Incorporating Force Feedback Control for Interfacial Force Microscopy,” Rev. Sci. Intrum., Vol. 62, pp. 710-715 (1991).
  5. [5] Kato, N., Suzuki, I., Kikuta, H. and Iwata, K., “Force-bablancing Force Sensor with an Optical Level,” Rev. Sci. Intrum., Vol. 66, pp. 5532-5536 (1995).
  6. [6] Shie, N. C., Cheng, K. Y. and Chen, T. L. “Use of Fiber Interferometer for AFM Cantilever Probe Displacement Control,” the Sixth Symposium on Nano Engineering and MENS, 4C-1 (2002).
  7. [7] Mill, M. L., Griffith, J. E. and Wanger, E. R., “A Rocking Beam Electrostatic Balance for the Measurement of Small Forces,” Rev. Sci. Intrum., Vol. 62, pp. 705-709 (1991).