A Micro Force Sensor Using Force-balancing Feedback Control System and Optic-fiber Interferometers

Kuai-Kai Chang; Nang-Chian Shie; Hung-Ming Tai; Tsan-Lin  Chen

doi:10.6180/jase.2004.7.2.07

A Micro Force Sensor Using Force-balancing Feedback Control System and Optic-fiber Interferometers

Physics

Kuai-Kai Chang This email address is being protected from spambots. You need JavaScript enabled to view it.¹, Nang-Chian Shie¹, Hung-Ming Tai¹ and Tsan-Lin Chen¹

¹Center for Measurement Standards Industrial Technology Research Institute Hsinchu, Taiwan 300, R.O.C.

Received: January 15, 2004
Accepted: February 17, 2004
Publication Date: June 1, 2004

Download Citation: ||https://doi.org/10.6180/jase.2004.7.2.07

ABSTRACT

The operation of a micro force-balancing force sensor with nN resolution is described. The system consists of a lever supported by torsion bars, a force controller, two electrostatic force actuators and two optic-fiber interferometers. The rotation of the lever is detected by the optic-fiber interferometers, and the lever returns its neutral position by using electrostatic -force feedback control system. The design of the force sensor and the minimum measurable range of the force sensor were analyzed by calculating force constants of torsion bars. A displacement of the lever with noise of 5 nm was obtained.

Keywords: Force-balancing Force Sensor, Optic-fiber Interferometers

REFERENCES

[1] Binning, G., Quate, C. F. and Gerber, C., “Single Three Dimensional Scanner for Scanning Tunneling Microscopy,” Rev. Sci. Instrum., Vol. 57, pp. 1688-1689 (1986).
[2] Yamamoto, T., Kasamatsu, Y. and Hyodo, H., “Advanced Stiction-free Slider and DLC Overcoat,” Fujitsu Sci. Tech. J., Vol. 37, pp. 201-211 (2001).
[3] Tsujimoto, K., Tsuji, S., Takatsuji, H., Kuroda, K., Saka, H. and Suzuki, Y., “Nanostructural Investigation of Whiskers and Hillocks of Al-based Metallization in Thin-film Tran- sistor Liquid Crystal Displays,” AIP Conf. Proc. 418, Vol. 418, pp. 395-400 (2000).
[4] Joyce, S. A. and Houston, J. E. “A New Force Sensor Incorporating Force Feedback Control for Interfacial Force Microscopy,” Rev. Sci. Intrum., Vol. 62, pp. 710-715 (1991).
[5] Kato, N., Suzuki, I., Kikuta, H. and Iwata, K., “Force-bablancing Force Sensor with an Optical Level,” Rev. Sci. Intrum., Vol. 66, pp. 5532-5536 (1995).
[6] Shie, N. C., Cheng, K. Y. and Chen, T. L. “Use of Fiber Interferometer for AFM Cantilever Probe Displacement Control,” the Sixth Symposium on Nano Engineering and MENS, 4C-1 (2002).
[7] Mill, M. L., Griffith, J. E. and Wanger, E. R., “A Rocking Beam Electrostatic Balance for the Measurement of Small Forces,” Rev. Sci. Intrum., Vol. 62, pp. 705-709 (1991).