Journal of Applied Science and Engineering

Published by Tamkang University Press

1.30

Impact Factor

1.60

CiteScore

Chao-Kuang Chen  1 and Chih-Min Yao1

1Computational Science Division National Center for High-Performance Computing Science-based Industrial Park Hsinchu, Taiwan 300, R.O.C.


 

Received: January 15, 2004
Accepted: March 3, 2004
Publication Date: June 1, 2004

Download Citation: ||https://doi.org/10.6180/jase.2004.7.2.10  


ABSTRACT


In this study a micrometer level component actuated via the thermal loading that induces forward and backward buckling phenomenon is tested via the finite element analysis (FEA). A branch of comparison is interpreted through the analytical closed forms. The characteristics embedded in the analytical closed forms could reflect on the finite element model for the micro-strip actuator. It’s a start for the advanced investigation for practice applications.


Keywords: Actuator, Thermal, Buckle


REFERENCES


  1. [1] Tai, Y. C., Fan, L. S. and Muller, R. S., “IC-processed Micro-Motors: Design, Technology and Testing,” Proc. IEEE Micro Electro Mechanical Systems, Salt Lake, UT, U.S.A., pp. 1-6 (1989).
  2. [2] Ahn, C. H., Kim, Y. J. and Allen, M. G.., “A Planar Variable Relucatance Magnetic Micromotor with Fully Integrated Stator and Wrapped Coils,” Proc. IEEE Micro Electro Mechanical Systems, Fort Lauderdale, FL, U.S.A., pp.1-6 (1993).
  3. [3] Akamine, S., Albercht, T. R., Zdeblick, M. J. and Quate, C. F., “A Planar Process for Microfabrication of STM and Eurosensors III (Transducer’89),” Vol. 2, pp. 243-246 (1989).
  4. [4] Takeshima, N. and Fujita, H., “Polyimide Bimorph Actuators for a Ciliary Motion System,” Micromechanical Sensors, Actuators and Systems (DSC-Vol. 32), ASME Winter Annual Meeting, Atlanta GA, U.S.A., pp. 203-209 (1991).
  5. [5] Sincla ir, M. and Wang, K., “Folded and Tapered-beam Thermal Actuator,” Proc. of SPIE, Vol. 5116, pp. 237-251 (2003).


    



 

1.6
2022CiteScore
 
 
60th percentile
Powered by  Scopus

SCImago Journal & Country Rank

Enter your name and email below to receive latest published articles in Journal of Applied Science and Engineering.