A Novel Measurement Device for SAW Chemical Sensors with FT-IR Spectro-microscopic Analytical Capability

Shi-Hung Hoang; Gor-Don Horng; Chen-Yu Chiang; Cheng-Hao Ko; Yi-Chung Lo; Ching-Iue Chen; Chao-Kang Chang

doi:10.6180/jase.2004.7.2.09

A Novel Measurement Device for SAW Chemical Sensors with FT-IR Spectro-microscopic Analytical Capability

Shi-Hung Hoang¹ , Gor-Don Horng¹ , Chen-Yu Chiang¹ , Cheng-Hao Ko This email address is being protected from spambots. You need JavaScript enabled to view it.¹, Yi-Chung Lo² , Ching-Iue Chen² and Chao-Kang Chang³

¹Graduate School of Electro-Optical Engineering Yuan Ze University Chungli, Taiwan 320, R.O.C.
²National Synchrotron Radiation Research Center Hsinchu, Taiwan 300, R.O.C.
³Union Chemical Laboratories Industrial Technology Research Institute Hsinch, Taiwan 300, R.O.C.

Received: February 11, 2004
Accepted: February 25, 2004
Publication Date: June 1, 2004

Download Citation: ||https://doi.org/10.6180/jase.2004.7.2.09

ABSTRACT

In this paper, we propose a novel characterization technique of the SAW chemical sensors. It combines the technique of electronic frequency shifting measurement (phase lock lop) with the IR microscopic spectral analyzer and performs a in-situ measurement. Using this method, we could conduct ultrahigh sensitive measurement in mass change (a few ppb-a few ppm range) of the SAW chemical sensors by cross-compared with the electronic signals of the SAW device and the FT-IR spectro-microscopic data of the molecular imprinted polymer (MIP) recognition thin film which deposit on the surface of the SAW device. With the use of the MIP thin films, we are able to provide a more accurate molecular selectivity than those current SAW chemical sensors which were based on regular chemical absorb films. Spectrum results of MIP films will be presented below.

Keywords: SAW, MIP, FT-IR

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