Analogous Micro-optical Components Fabricated Using Excimer Laser Ablation

Hsiharng Yang; Cheng-Tang Pan

doi:10.6180/jase.2003.6.3.03

Analogous Micro-optical Components Fabricated Using Excimer Laser Ablation

Physics

Hsiharng Yang ¹ and Cheng-Tang Pan²

¹Institute of Precision Engineering National Chung Hsing University Taichung, Taiwan 402, R.O.C.
²Mechanical Industry Research Laboratories Industrial Technology Research Institute Hsinchu, Taiwan 310, R.O.C.

Received: May 16, 2003
Accepted: June 23, 2003
Publication Date: September 1, 2003

Download Citation: ||https://doi.org/10.6180/jase.2003.6.3.03

ABSTRACT

The numerical simulations were used to predict the profile of analogous microstructures following excimer laser ablation to obtain desired micro-optical components. The simulation technique applied in the excimer laser ablation can reduce the quantity of machining experiments. The ablated microstructures with surface roughness of Ra < 20 nm were successfully machined into micro-optical components for further applications. The excimer laser machining parameters included laser energy, shot number, and repetition rate. 3-D microstructures formations were numerically simulated. Various micro-optical components with low aspect ratios can utilize these laser ablation numerical simulations and to form desired application geometries.

Keywords: Microlens, Excimer Laser, Micromachining, MEMS

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