Li-Xia Yu This email address is being protected from spambots. You need JavaScript enabled to view it.1,2, Li Qin1,3 and Ai-Da Bao1,3
1National Key Laboratory of Electronic Measurement Technology, North University of China, Taiyuan, Shanxi 030051, P.R. China 2School of Information and Communication on Engineering, North University of China, Taiyuan, Shanxi 030051, P.R. China 3School of Instrument and Electronics, North University of China, Taiyuan, Shanxi 030051, P.R. China
Received: October 30, 2014 Accepted: February 24, 2015 Publication Date: March 1, 2015
MEMS accelerometer can measure acceleration information for carrier in movement, mainly used in the inertial navigation field of aerospace and aviation accompanied with vibration interference. In order to analyze the reliability of MEMS accelerometer in vibration environment, the method of MEMS accelerometer’s reliability testing and life prediction under accelerated constant stress were proposed. Aiming at analyzing the typical failure modes of accelerometer with bilateral four beam structure, the paper adopted the accelerated constant stress testing and analyzed testing data by statistical method. The shape parameter’s estimation value under each accelerated stress agrees with constraint theory that Weibull distribution parameters are almost identical. Therefore the reliability prediction model of MEMS accelerometer was established by the inverse power law model, and the work condition under design vibration stress was predicted. The prediction results show that the reliability index of bilateral four beams MEMS accelerometer is better than 0.9 under design vibration stress, and its life can reach 83 h.
Keywords: Bilateral Four Beams, MEMS Accelerometer, Random Vibration, Reliability Index Prediction
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