Journal of Applied Science and Engineering

Published by Tamkang University Press

1.30

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2.10

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Xin Kang This email address is being protected from spambots. You need JavaScript enabled to view it.1,2, Ding-Guo Zhang1 and Ming Jiang3

1Department of Applied Mechanics, Nanjing University of Science and Technology, Nanjing 210094, P.R. China
2Department of Mechanical and Aeronautical Engineering, University of California, Davis, 95616, US
3Department of Engineering Mechanics, Suzhou University of Science and Technology, Suzhou 215011, P.R. China


 

Received: December 10, 2012
Accepted: June 28, 2013
Publication Date: December 1, 2013

Download Citation: ||https://doi.org/10.6180/jase.2013.16.4.03  


ABSTRACT


In this paper the dynamic characteristics of a piezoelectric micromachined ultrasonic transducer (pMUT) was studied using couple stress theory and Rayleigh-Ritz method. The transducer membrane is a multilayered disc, which includes a piezoelectric layer, an elastic layer and two electrode layers. Since the whole thickness of the transducer membrane is in micro-scale, the size dependence of the dynamic deformation behavior was evaluated using couple stress theory. The response of the transducer to ultrasonic wave was analyzed using modal decomposition and Bessel function, and was implemented by Matlab software. The results show that the non-dimensional rigidity of the transducer membrane increases obviously when the thickness of the membrane is in micro-scale, and this results in a shift of the resonant frequency of the transducer. Moreover the output electric charge and voltage for the first mode of the transducer are reduced accordingly because of the increase of non-dimensional rigidity. Further analysis shows that the optimal diameter ratio of top electrode to transducer membrane for a maximal output of electric charge obtained by the first mode is around 0.674. However this diameter ratio is not applicable to the output voltage for an open-circuit system.


Keywords: Piezoelectric Micromachined Ultrasonic Transducer, Dynamic Characteristics, Size Effect, Rayleigh-Ritz Method


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