A Planar Vibration Sensor for Mechanical Characterization of Nanowires

L.  Zhang; J.  Lu; H.  Takagi; R.  Maeda

doi:10.6180/jase.2013.16.4.01

A Planar Vibration Sensor for Mechanical Characterization of Nanowires

L. Zhang This email address is being protected from spambots. You need JavaScript enabled to view it.¹, J. Lu¹, H. Takagi¹ and R. Maeda¹

¹Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan

Received: May 1, 2013
Accepted: October 10, 2013
Publication Date: December 1, 2013

Download Citation: ||https://doi.org/10.6180/jase.2013.16.4.01

ABSTRACT

Nanowires have attracted considerable interest as the nanoscale interconnects and as the moving elements of both electronic and electromechanical devices. The evaluation of nanomechanical property plays a significant role in the development of new nanowire-based devices. Recently, we are engaged in developing an easy method for nanomechanical measurement by using an in-plane-mode piezoresistive vibration sensor fabricated with less process cost and package difficulties. Theoretical analysis and simulation results suggested that the device is capable of high-sensitive and variety, and it is expected to evaluate mechanical properties of metallic or metallic oxide nanowires.

Keywords: Nanowires, Mechanical Property, MEMS, Piezoresistive Sensor

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