L. Zhang 1, J. Lu1, H. Takagi1 and R. Maeda1
1Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan
Received:
May 1, 2013
Accepted:
October 10, 2013
Publication Date:
December 1, 2013
Download Citation:
||https://doi.org/10.6180/jase.2013.16.4.01
ABSTRACT
Nanowires have attracted considerable interest as the nanoscale interconnects and as the moving elements of both electronic and electromechanical devices. The evaluation of nanomechanical property plays a significant role in the development of new nanowire-based devices. Recently, we are engaged in developing an easy method for nanomechanical measurement by using an in-plane-mode piezoresistive vibration sensor fabricated with less process cost and package difficulties. Theoretical analysis and simulation results suggested that the device is capable of high-sensitive and variety, and it is expected to evaluate mechanical properties of metallic or metallic oxide nanowires.
Keywords:
Nanowires, Mechanical Property, MEMS, Piezoresistive Sensor
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