Chien Jong Shih  ¹ and Kuang You Chen¹

¹Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, Taiwan 251, R.O.C.

ABSTRACT

In order to satisfy the accelerating nanotechnology of high-tech precision manufacturing, it is essential to develop the efficient integration of amplifying device producing very fine resolution.  This paper proposes such a development using topological optimal synthesis to design a monolithic mechanical amplifying lever actuated by a PZT in single-axis nano-positioning stage.  This one-piece compound compliant mechanism consists of an amplifier and nano-motion bed.  The resultant amplifier yields to a larger magnification factor than that in original design.  The completed design implementation shows that the presenting design optimization is practical to apply.  In addition, it provides a creative computational aided design (CAD) environment and integrated design process for mechanical amplifier and nano-positioning stage.

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