Jyh-Wei Lee 1, Jen-Ching Huang1 and Jenq-Gong Duh2
1Department of Mechanical Engineering Tung Nan Institute of Technology Shenken, Taiwan 222, R.O.C.
2Department of Materials Science and Engineering National Tsing Hua University Hsinchu, Taiwan 300, R.O.C.
Received:
July 13, 2004
Accepted:
August 30, 2004
Publication Date:
December 1, 2004
Download Citation:
||https://doi.org/10.6180/jase.2004.7.4.06
ABSTRACT
Nano mechanical properties are critical for components in microelectro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS). Nanoindentation methods are employed to characterize nano mechanical properties of reactive R. F. magnetron sputtered CrN thin film. The nano hardness and elastic modulus of CrN film are 22.6 GPa and 216 GPa, respectively. The average friction coefficient of CrN film is 0.19. The residual wear depth of CrN film ranges from 4.01 to 5.29 nm after reciprocating wear test under 300, 400 and 500 μN loads. The CrN thin film exhibits very promising wear resistance.
Keywords:
Nanoindentation, CrN, Nano Hardness, Nano Scratch, Nano Wear
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