Journal of Applied Science and Engineering

Published by Tamkang University Press


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Yu-Cheng Ou This email address is being protected from spambots. You need JavaScript enabled to view it.1, Chih-Sheng Yu1, Chih-Chung Yang1, Chun-Ming Chang1, Yu-Hsiang Tang1 and Yu-Hsin Lin1

1Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan 300, R.O.C.


Received: December 16, 2011
Accepted: February 29, 2012
Publication Date: December 1, 2012

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A passive biomimic PDMS valve applied in thermopneumatic micropump is firstly designed and realized. Unlike the conventional peristaltic pumping configuration, the micropump consists of two stacking layers of PDMS on a glass slide. This sandwich-type structure builds up two chambers. A thermopneumatic actuation chamber consists of a 57 ohm heater on the glass slide; the other fluid chamber is connected with inlet and outlet microchannel. A diaphragm between chambers isolates chamber mediums and transmits the thermopneumatic actuation. More importantly, the fluid chamber connects to microchannels via two passive biomimic PDMS valves. Thus, the fluid is driven and constrained in one way flow by the valves. The two passive biomimic PDMS valves produce one-way flow as the actuation diaphragm squeezing and releasing the pumping chamber. The micropump is driven by 1 Hz AC square wave of 10 volt peak. The thermopneumatic PDMS-based micropump is preliminarily tested and driven for 36 seconds. As the result, the measured flow rate of thermopneumatic micropump is 100 nL/min.

Keywords: PDMS Micropump, Passive Valve, Sandwich-Type Structure, Nano-Liter Manipulation


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