Biomimic PDMS Valve Applied in Thermopneumatic Micropump

Yu-Cheng  Ou; Chih-Sheng Yu; Chih-Chung  Yang; Chun-Ming  Chang; Yu-Hsiang Tang; Yu-Hsin Lin

doi:10.6180/jase.2012.15.4.01

Biomimic PDMS Valve Applied in Thermopneumatic Micropump

Yu-Cheng Ou This email address is being protected from spambots. You need JavaScript enabled to view it.¹, Chih-Sheng Yu¹, Chih-Chung Yang¹, Chun-Ming Chang¹, Yu-Hsiang Tang¹ and Yu-Hsin Lin¹

¹Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan 300, R.O.C.

Received: December 16, 2011
Accepted: February 29, 2012
Publication Date: December 1, 2012

Download Citation: ||https://doi.org/10.6180/jase.2012.15.4.01

ABSTRACT

A passive biomimic PDMS valve applied in thermopneumatic micropump is firstly designed and realized. Unlike the conventional peristaltic pumping configuration, the micropump consists of two stacking layers of PDMS on a glass slide. This sandwich-type structure builds up two chambers. A thermopneumatic actuation chamber consists of a 57 ohm heater on the glass slide; the other fluid chamber is connected with inlet and outlet microchannel. A diaphragm between chambers isolates chamber mediums and transmits the thermopneumatic actuation. More importantly, the fluid chamber connects to microchannels via two passive biomimic PDMS valves. Thus, the fluid is driven and constrained in one way flow by the valves. The two passive biomimic PDMS valves produce one-way flow as the actuation diaphragm squeezing and releasing the pumping chamber. The micropump is driven by 1 Hz AC square wave of 10 volt peak. The thermopneumatic PDMS-based micropump is preliminarily tested and driven for 36 seconds. As the result, the measured flow rate of thermopneumatic micropump is 100 nL/min.

Keywords: PDMS Micropump, Passive Valve, Sandwich-Type Structure, Nano-Liter Manipulation

REFERENCES

[1] Mamanee, W., Tuantranont, A., Afzulpurkar, N. V., Porntheerapat, N., Rahong, S. and Wisitsoraat, A., “PDMS Based Thermopnuematic Peristaltic Micropump for Microfluidic Systems,” Journal of Physics: Conference Series, Vol. 34, pp. 564569 (2006).
[2] Jeong, O. C. and Konishi, S., “Fabrication and Drive Test of Pneumatic PDMS Micro Pump,” Sensors & Actuators: A. Physical, Vol. 135, pp. 849856 (2007).
[3] Boden, R., Simu, U., Margell, J., Lehto, M., Hjort, K., Thornell, G. and Schweitz, J. A., “Metallic High-Pressure Microfluidic Pump with Active Valves,” Proc. of 2007 Solid-State Sensors, Actuators and Microsystems Conference, Lyon, France, June 1014 (2007).
[4] Yang, Y. J. and Liao, H. H., “Development and Characterization of Thermopneumatic Peristaltic Micropumps,” Journal of Micromechanics and Microengineering, Vol. 19, pp. 113 (2009).
[5] Kovacs, G. T. A., Micromachined Transducers Sourcebook, 1st ed, WCB/McGraw-Hill, Boston (1998).
[6] Van De Pol, F. C. M., A Pump Based on Micro-Engineering Techniques, Ph. D. Dissertation, University of Twente, Enschede, Netherlands (1989).
[7] Stemme, E. and Stemme, G., “A Valve-Less Diffuser/ Nozzle Based Fluid Pump,” Sensors and Actuators, Vol. 39, pp. 159167 (1993).
[8] Olsson, A., Stemme, G. and Stemme, E., “A ValveLess Planar Fluid Pump Chambers,” Sensors and Actuators, Vol. 4647, pp. 549556 (1995).
[9] Yang, K. S., Chen, I. Y., Shew, B. Y. and Wang, C. C., “Investigation of the Flow Characteristics within a Micronozzle/Diffuser,” Journal of Micromechanical and Microengineering, Vol. 14, pp. 2631 (2004).
[10] Yang, L. J. and Lin, T. Y., “A PDMS-Based ThermoPneumatic Micropump with Parylene Inner Walls,” Microelectronic Engineering, Vol. 88, pp. 18941897 (2011).
[11] Jo, B. H., Van Lerberghe, L. M., Motsegood, K. M. and Beebe, D. J., “Three-Dimensional Micro-Channel Fabrication in Polydimethylsiloxane (PDMS) Elastomer,” Journal of MicroelectroMechanical System, Vol. 9, pp. 7681 (2000).