Lung-Jieh Yang 1 and Kuan-Chun Liu1
1Department of Mechanical and Electro-mechanical Engineering, Tamkang University, Tamsui, Taiwan 251, R.O.C.
Received:
March 14, 2007
Accepted:
April 11, 2007
Publication Date:
June 1, 2007
Download Citation:
||https://doi.org/10.6180/jase.2007.10.2.08
ABSTRACT
The design, the fabrication, and the testing result of a novel microvalve actuated by surface tension force were described in this work. This device comprises of a parylene microtube for liquid transportation and a peacock-like SU-8 capillary microstructure for switching the microvalve in a buckling deformation way without feeding external electrical power. The maximal spreading angles of the peacock-like structures actuated by water surface tension are experimentally tested as 204 º and 15 ° for the cases of not integrating and integrating a parylene microtube, respectively.
Keywords:
Surface Tension, SU-8, Parylene, Actuator, Buckling
REFERENCES
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