A Post-Design of Topology Optimization for Mechanical Compliant Amplifier in MEMS

C. F. Lin; C. J.  Shih

doi:10.6180/jase.2006.9.3.04

A Post-Design of Topology Optimization for Mechanical Compliant Amplifier in MEMS

C. F. Lin¹ and C. J. Shih This email address is being protected from spambots. You need JavaScript enabled to view it.¹

¹Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, Taiwan 251, R.O.C.

Received: March 24, 2005
Accepted: September 16, 2005
Publication Date: September 1, 2006

Download Citation: ||https://doi.org/10.6180/jase.2006.9.3.04

ABSTRACT

The topology synthesis approach can generate a creative initial optimized configuration and can generate approximately well locations of hinges. It is particularly useful to form a monolithic compliant mechanism in MEMS application. However, the formation of hinges-like portion is typically encountered as a major unsolved problem. Such hinges unavoidably exist in the topological layout but cannot practically manufacture. This paper proposes an approach using the analytic single-axis flexure hinge integrated with the formal optimization as a post-design process to obtain optimum flexure hinges and its location for promoting the overall performance. A compliant micro gripper/magnifying mechanism is adopted as an example to illustrate the presenting approach; and a multi-objective optimization problem consisting of several constraints are constructed to determine nine unknowns. The numerical experiment shows the proposed post-optimum design is effective and can be utilized to other similar design situation.

Keywords: Flexure Hinge, Compliant Mechanism, Engineering Optimization, MEMS, Mechanical Design

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