Ching-Hua Wei1, Chin-Tu Lu1, Wu-Chung Sue1, Ching-Min Chang This email address is being protected from spambots. You need JavaScript enabled to view it.1 and Chun-Ko Chen1
1Department of Mechanical Engineering, Southern Taiwan University of Technology, Tainan, Taiwan 710, R.O.C.
Received: March 16, 2007 Accepted: May 4, 2007 Publication Date: June 1, 2007
This paper reports the characteristic of titanium dioxide (TiO2) thin film prepared by sputtering on the ITO glass. The principal parameter in sputtering process is to change temperature of substrate holder in the sputtering chamber. Five different temperatures (22, 50, 100, 150 and 200 ºC) were set on the substrate holder. After preparing TiO2 thin film, the transparency and absorptive performance of TiO2 thin film between 200~450 nm were inspected by using UV-VIS spectrophotometer. The hydrophilic property of TiO2 thin film by UV-light irradiation was observed by using contact angle measurement. The results showed that all the thin films, manufactured at different temperature, had ability to absorb UV-light and to perform good transparency. The contact angle measurement showed the films made by the higher temperature of substrate holder can get better hydrophilic property.
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