Although electron beam lithography has been demonstrated to have distinguished performance in creating 3D micro polymer structures, the process design for creating the desired shape still largely depends on a trials and errors basis. A cellular automata based process emulator is developed and presented under an OpenGL environment for reducing the cost and shortening the development period of the process. By using a convolution approach, this emulator converts the processing parameters into the final spatial dosage distribution and subsequently, the final geometry of structures. Examples of 3D micro structures such as micro lens are presented. By the tool, it is possible to provide guidelines for optimizing the fabrication process and reducing the cost for the related e-beam lithography based 3D fabrication.
Keywords: Electron Beam Lithography, CAD, Cellular Automata, Micro Fabrication
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