Yuh-Chung Hu This email address is being protected from spambots. You need JavaScript enabled to view it.1 and Guan-De Lee1

1Advanced Manufacturing Research Center & Department of Mechatronic Engineering, Huafan University, Taipei, Taiwan 223, R.O.C.


 

Received: February 23, 2007
Accepted: April 17, 2007
Publication Date: June 1, 2007

Download Citation: ||https://doi.org/10.6180/jase.2007.10.2.09  


ABSTRACT


This paper derives a closed form solution with fringing filed effects for the pull-in voltages of the micro fixed-fixed beam subjected to electrostatic loads and initial stress. The closed form solution is derived based on the Euler’s beam theory and the energy method. The accuracy of the present closed form solution is verified through comparing with the experimentally measured data of the published literatures. The error of the present closed form solution is within 1% compared to the measured data. The present closed form solution is more accurate than the past works and is very simple and highly accurate for implementation in the design of MEMS.


Keywords: Electrostatic, Fringing Field, MEMS, Pull-in Voltage


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