{"id":3112,"date":"2026-04-09T23:48:34","date_gmt":"2026-04-09T15:48:34","guid":{"rendered":"https:\/\/iweb20wp-b205b.url.tku.edu.tw\/jase\/?post_type=tkuisotope&p=3112"},"modified":"2026-06-10T14:32:16","modified_gmt":"2026-06-10T06:32:16","slug":"system-level-simulation-and-fabrication-of-soi-mems-differential-capacitive-accelerometer","status":"publish","type":"tkuisotope","link":"\/jase\/?tkuisotope=system-level-simulation-and-fabrication-of-soi-mems-differential-capacitive-accelerometer","title":{"rendered":"System level simulation and fabrication of SOI-MEMS differential Capacitive accelerometer"},"content":{"rendered":"\n
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<\/i> 2024<\/a><\/p>\n<\/div>\n\n\n\n

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<\/i> Volume 27, Issue 3<\/a><\/p>\n<\/div>\n\n\n\n

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Veena.S1<\/sup><\/i><\/a>, H.L Suresh2<\/sup>, Newton Rai3<\/sup>, Veerapandi N4<\/sup>, and Veda Sandeep Nagaraj5<\/sup><\/p>\n\n\n\n

1<\/sup>Department of Electrical and Electronics Engineering, Nitte Meenakshi Institute of Technology, Bangalore<\/p>\n\n\n\n

2<\/sup>Department of Electrical and Electronics Engineering, Sir.M Visvesvaraya Institute of Technology, Bangalore<\/p>\n\n\n\n

3<\/sup>Mechanical Department, University of Colorado Boulder<\/p>\n\n\n\n

4<\/sup>Centre for Nano Science and Engineering(CeNSE), Indian Institute of Science(IISc), Bangalore<\/p>\n\n\n\n

5<\/sup>Tyndall National Institute, University College Cork, Ireland<\/p>\n<\/div>\n\n\n\n

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Received:\u00a0December 13, 2022
Accepted:\u00a0June 21, 2023
Publication Date:\u00a0April 9, 2026<\/p>\n<\/div>\n<\/div>\n\n\n\n

\"\u4e0a\u50b3\u5716\u7247\"\n\n\n

Positioning of the combs in the accelerometer.<\/p>\n<\/div>\n<\/div>\n\n\n\n

<\/i> Copyright <\/strong>The Author(s). This is an open access article distributed under the terms of the Creative Commons Attribution License (CC BY 4.0)<\/a>, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are cited.<\/p>\n\n\n\n

Download Citation:\u00a0 BibTeX <\/a>| http:\/\/dx.doi.org\/10.6180\/jase.202403_27(3).0012<\/a>\u00a0\u00a0<\/p>\n\n\n\n

Download PDF<\/a><\/p>\n\n\n\n

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This study primarily covers the design and development of an MEMS based accelerometer. Frequency, displacement sensitivity, and capacitance are the subject of analytical modelling; the corresponding values are found to be 7.41kHz, 4.5096\u2217<\/sup>10\u22129<\/sup> m\/g, and 0.289pF respectively. COMSOL Multiphysics is used to design the structure of accelerometer and the MATLAB simulator tool is used to analyse the accelerometer. In order to obtain precise results, simulations are done and theoretical calculations are compared. Silicon-on-Insulator Multi-User MEMS Processes (SOIMUMPS) technology is employed to fabricate the accelerometer structure at MEMSCAP foundry, United State. The characterization of the fabricated device is done at CENSE, IISc, Bangalore. The capacitance values on either side of the device obtained from the test results are 0.36pF and 0.85pF when 5 V is applied to the electrodes. The proposed accelerometer is employed in the actuating parts of the sensor due to its properties like linearity and low sensitivity.<\/p>\n\n\n\n

Keywords:\u00a0MEMs Capacitive Accelerometer, COMSOL, SOI MUMPS, Fabrication, Characterisation, Sensitivity.<\/em><\/p>\n\n\n\n

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  1. [1] V. Baban, D. Argintaru, and E. Constantinescu. \u201cAnalysis and simulation of a MEMS based accelerometer used to monitor the movement of a sea waves\u201d. In: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies XI. 12493. SPIE. 2023, 509\u2013515. DOI: 10.1117\/12.2643251.<\/li>\n
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  5. [5] J. Huang, Y. Zhao, G. M. Xia, Q. Shi, and A. P. Qiu, (2022) \u201cSystematic modeling of a MEMS resonant accelerometer based on displacement coordination” IEEE Sensors Journal 22(7): 6454\u20136465. DOI: 10.1109\/JSEN.2022.3155605.<\/li>\n
  6. [6] S. Veena, A. Sthuti, H. Suresh, M. Nagaraj, et al., (2022) \u201cSimulation and analysis of suspension based single axis mems capacitive accelerometer” International Journal of Basic and Applied Science 11(3): 107\u2013116. DOI: 10.35335\/ijobas.v11i3.119.<\/li>\n
  7. [7] N. Rai, H. Suresh, V. S. Nagaraja, et al., (2021) \u201cDesign, modelling, and simulation analysis of a single axis MEMS-based capacitive accelerometer” arXiv preprint arXiv:2111.03816: DOI: 10.14445\/22315381\/IJETTV69I10P211.<\/li>\n
  8. [8] C. Likhith, K. Asha, and N. Krishnaswamy. \u201cDesign and Simulation of Parallel Plate-Comb Type Mems Capacitive Accelerometer Using COMSOL\u201d. In: Micro and Nanoelectronics Devices, Circuits and Systems: Select Proceedings of MNDCS 2022. Springer, 2022, 389\u2013405. DOI: 10.1007\/978-981-19-2308-1_40.<\/li>\n
  9. [9] S. Veena, N. Rai, A. M. R. Morey, H. Suresh, and H. Shaik. \u201cDesign and Simulation of MEMS Based Capacitive Accelerometer\u201d. In: IoT and Analytics for Sensor Networks: Proceedings of ICWSNUCA 2021. Springer. 2022, 207\u2013223. DOI: 10.1007\/978-981-16-2919-8.<\/li>\n
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