{"id":10992,"date":"2026-09-05T13:25:46","date_gmt":"2026-09-05T05:25:46","guid":{"rendered":"\/jase\/?post_type=tkuisotope&#038;p=10992"},"modified":"2026-09-14T18:24:29","modified_gmt":"2026-09-14T10:24:29","slug":"biomimic-pdms-valve-applied-in-thermopneumatic-micropump","status":"publish","type":"tkuisotope","link":"\/jase\/?tkuisotope=biomimic-pdms-valve-applied-in-thermopneumatic-micropump","title":{"rendered":"Biomimic PDMS Valve Applied in Thermopneumatic Micropump"},"content":{"rendered":"\n<div class=\"wp-block-tkuwpbs5-bs5-row row article-info\">\n<div class=\"wp-block-tkuwpbs5-bs5-column col-md-3 align-self-start\">\n<p><i class=\"fa fa-folder\" aria-hidden=\"true\"><\/i>&nbsp;<a href=\"\/jase\/?page_id=10956\" data-type=\"page\" data-id=\"10956\">2012<\/a><\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-tkuwpbs5-bs5-column col-md-3 align-self-start\">\n<p><i class=\"fa fa-folder-open\" aria-hidden=\"true\"><\/i>&nbsp;<a href=\"\/jase\/?page_id=10954\" data-type=\"page\" data-id=\"10954\">Volume 15, Issue 4<\/a><\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-tkuwpbs5-bs5-column col-md-6 align-self-start\">\n<div class=\"wp-block-tkuwpbs5-bs5-div dv_publish\" data-aos=\"normal\"><div class=\"wp-block-post-date\"><time datetime=\"2026-09-05T13:25:46+08:00\">2026-09-05<\/time><\/div><\/div>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-tkuwpbs5-bs5-row row\">\n<div class=\"wp-block-tkuwpbs5-bs5-column col-md-5 align-self-start\">\n<div class=\"wp-block-tkuwpbs5-bs5-div au-ol\" data-aos=\"normal\">\n<p>Yu-Cheng Ou<a href=\"mailto:ycou@itrc.narl.org.tw\"><i class=\"fa fa-envelope\"><\/i><\/a>, Chih-Sheng Yu, Chih-Chung Yang, Chun-Ming Chang, Yu-Hsiang Tang and Yu-Hsin Lin<a href=\"mailto:ycou@itrc.narl.org.tw\"><\/a><\/p>\n\n\n\n<p style=\"font-size:14px\">Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan 300, R.O.C.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-tkuwpbs5-bs5-div\" style=\"margin-top:var(--wp--preset--spacing--40)\" data-aos=\"normal\">\n<p>Received:\u00a0December 16, 2011<br>Accepted:\u00a0February 29, 2012<br>Publication Date:\u00a0December 1, 2012<\/p>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-tkuwpbs5-bs5-column col-md-7 align-self-start clk=\u5716\u7247\"><img decoding=\"async\" src=\"\/jase\/wp-content\/uploads\/2026\/09\/15_4_01.jpg\" class=\"img-fluid img-fluid mx-auto d-block\" alt=\"\u4e0a\u50b3\u5716\u7247\">\n\n\n<p class=\"has-text-align-center img_caption\">3-D view of the thermopneumatic micropump.<\/p>\n<\/div>\n<\/div>\n\n\n\n<p class=\"has-small-font-size\"><i class=\"fab fa-creative-commons\"><\/i>&nbsp;<strong>Copyright&nbsp;<\/strong>The Author(s). This is an open access article distributed under the terms of the&nbsp;<a rel=\"noreferrer noopener\" href=\"https:\/\/creativecommons.org\/licenses\/by\/4.0\/\" target=\"_blank\">Creative Commons Attribution&nbsp;License (CC BY 4.0)<\/a>, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are cited.<\/p>\n\n\n\n<p>Download Citation:&nbsp; <a href=\"\/jase\/wp-content\/uploads\/2026\/09\/V15.4.01.bib\" data-type=\"attachment\" data-id=\"11456\" target=\"_blank\" rel=\"noreferrer noopener\">BibTeX <\/a>| <a rel=\"noreferrer noopener\" href=\"http:\/\/dx.doi.org\/10.6180\/jase.2012.15.4.01\" target=\"_blank\">http:\/\/dx.doi.org\/10.6180\/jase.2012.15.4.01<\/a>&nbsp;&nbsp;<\/p>\n\n\n\n<p class=\"btn btn-primary article-btn\"><a href=\"\/jase\/wp-content\/uploads\/2026\/09\/01-10008_V15i4.pdf\" data-type=\"attachment\" data-id=\"11457\" target=\"_blank\" rel=\"noreferrer noopener\">Download PDF<\/a><\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p>A passive biomimic PDMS valve applied in thermopneumatic micropump is firstly designed and realized. Unlike the conventional peristaltic pumping configuration, the micropump consists of two stacking layers of PDMS on a glass slide. This sandwich-type structure builds up two chambers. A thermopneumatic actuation chamber consists of a 57 ohm heater on the glass slide; the other fluid chamber is connected with inlet and outlet microchannel. A diaphragm between chambers isolates chamber mediums and transmits the thermopneumatic actuation. More importantly, the fluid chamber connects to microchannels via two passive biomimic PDMS valves. Thus, the fluid is driven and constrained in one way flow by the valves. The two passive biomimic PDMS valves produce one-way flow as the actuation diaphragm squeezing and releasing the pumping chamber. The micropump is driven by 1 Hz AC square wave of 10 volt peak. The thermopneumatic PDMS-based micropump is preliminarily tested and driven for 36 seconds. As the result, the measured flow rate of thermopneumatic micropump is 100 nL\/min.<\/p>\n\n\n\n<p><em>Keywords:&nbsp;PDMS Micropump, Passive Valve, Sandwich-Type Structure, Nano-Liter Manipulation<\/em><\/p>\n\n\n\n<div style=\"height:2rem\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<div class=\"wp-block-tkuwpbs5-bs5-div ref_ol\" data-aos=\"normal\">\n<ol>\n<li>[1] Mamanee, W., Tuantranont, A., Afzulpurkar, N. V., Porntheerapat, N., Rahong, S. and Wisitsoraat, A., \u201cPDMS Based Thermopnuematic Peristaltic Micropump for Microfluidic Systems,\u201d Journal of Physics: Conference Series, Vol. 34, pp. 564\u2013569 (2006).<\/li>\n<li>[2] Jeong, O. C. and Konishi, S., \u201cFabrication and Drive Test of Pneumatic PDMS Micro Pump,\u201d Sensors &amp; Actuators: A. Physical, Vol. 135, pp. 849\u2013856 (2007).<\/li>\n<li>[3] Boden, R., Simu, U., Margell, J., Lehto, M., Hjort, K., Thornell, G. and Schweitz, J. A., \u201cMetallic High-Pressure Microfluidic Pump with Active Valves,\u201d Proc. of 2007 Solid-State Sensors, Actuators and Microsystems Conference, Lyon, France, June 10\u201314 (2007).<\/li>\n<li>[4] Yang, Y. J. and Liao, H. H., \u201cDevelopment and Characterization of Thermopneumatic Peristaltic Micropumps,\u201d Journal of Micromechanics and Microengineering, Vol. 19, pp. 1\u201313 (2009).<\/li>\n<li>[5] Kovacs, G. T. A., Micromachined Transducers Sourcebook, 1st ed, WCB\/McGraw-Hill, Boston (1998).<\/li>\n<li>[6] Van De Pol, F. C. M., A Pump Based on Micro-Engineering Techniques, Ph. D. Dissertation, University of Twente, Enschede, Netherlands (1989).<\/li>\n<li>[7] Stemme, E. and Stemme, G., \u201cA Valve-Less Diffuser\/Nozzle Based Fluid Pump,\u201d Sensors and Actuators, Vol. 39, pp. 159\u2013167 (1993).<\/li>\n<li>[8] Olsson, A., Stemme, G. and Stemme, E., \u201cA Valve-Less Planar Fluid Pump Chambers,\u201d Sensors and Actuators, Vol. 46\u201347, pp. 549\u2013556 (1995).<\/li>\n<li>[9] Yang, K. S., Chen, I. Y., Shew, B. Y. and Wang, C. C., \u201cInvestigation of the Flow Characteristics within a Micronozzle\/Diffuser,\u201d Journal of Micromechanical and Microengineering, Vol. 14, pp. 26\u201331 (2004).<\/li>\n<li>[10] Yang, L. J. and Lin, T. Y., \u201cA PDMS-Based Thermo-Pneumatic Micropump with Parylene Inner Walls,\u201d Microelectronic Engineering, Vol. 88, pp. 1894\u20131897 (2011).<\/li>\n<li>[11] Jo, B. H., Van Lerberghe, L. M., Motsegood, K. M. and Beebe, D. J., \u201cThree-Dimensional Micro-Channel Fabrication in Polydimethylsiloxane (PDMS) Elastomer,\u201d Journal of MicroelectroMechanical System, Vol. 9, pp. 76\u201381 (2000).<\/li>\n<\/ol>\n<\/div>\n\n\n\n<p><\/p>\n","protected":false},"author":3,"template":"wp-custom-template-detail-4-aricles","meta":{"_uag_custom_page_level_css":""},"categories":[1855,6,1859],"tags":[1942],"acf":[],"uagb_featured_image_src":[],"uagb_author_info":{"display_name":"\u6797\u923a\u6db5","author_link":"\/jase\/?author=3"},"uagb_comment_info":0,"uagb_excerpt":"&nbsp;Copyright&nbsp;The Author(s). This is an open access article distributed under the terms of the&nbsp;Creative Commons Attribution&nbsp;License (CC BY 4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are cited. Download Citation:&nbsp; BibTeX | http:\/\/dx.doi.org\/10.6180\/jase.2012.15.4.01&nbsp;&nbsp; Download PDF A passive biomimic PDMS valve applied in thermopneumatic micropump is firstly&hellip;","_links":{"self":[{"href":"\/jase\/index.php?rest_route=\/wp\/v2\/tkuisotope\/10992"}],"collection":[{"href":"\/jase\/index.php?rest_route=\/wp\/v2\/tkuisotope"}],"about":[{"href":"\/jase\/index.php?rest_route=\/wp\/v2\/types\/tkuisotope"}],"author":[{"embeddable":true,"href":"\/jase\/index.php?rest_route=\/wp\/v2\/users\/3"}],"wp:attachment":[{"href":"\/jase\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=10992"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"\/jase\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=10992"},{"taxonomy":"post_tag","embeddable":true,"href":"\/jase\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=10992"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}