{"id":10935,"date":"2026-08-26T20:46:50","date_gmt":"2026-08-26T12:46:50","guid":{"rendered":"\/jase\/?post_type=tkuisotope&p=10935"},"modified":"2026-08-29T19:23:21","modified_gmt":"2026-08-29T11:23:21","slug":"a-planar-vibration-sensor-for-mechanical-characterization-of-nanowires","status":"publish","type":"tkuisotope","link":"\/jase\/?tkuisotope=a-planar-vibration-sensor-for-mechanical-characterization-of-nanowires","title":{"rendered":"A Planar Vibration Sensor for Mechanical Characterization of Nanowires"},"content":{"rendered":"\n
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<\/i> 2013<\/a><\/p>\n<\/div>\n\n\n\n

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<\/i> Volume 16, Issue 4<\/a><\/p>\n<\/div>\n\n\n\n

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L. Zhang<\/i><\/a>, J. Lu, H. Takagi and R. Maeda<\/p>\n\n\n\n

Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan<\/p>\n<\/div>\n\n\n\n

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Received: May 1, 2013
Accepted: October 10, 2013
Publication Date: December 1, 2013<\/p>\n<\/div>\n<\/div>\n\n\n\n

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Schematic of the vibration sensor testing systemset up.<\/p>\n<\/div>\n<\/div>\n\n\n\n

<\/i> Copyright <\/strong>The Author(s). This is an open access article distributed under the terms of the Creative Commons Attribution License (CC BY 4.0)<\/a>, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are cited.<\/p>\n\n\n\n

Download Citation:  BibTeX <\/a>| http:\/\/dx.doi.org\/10.6180\/jase.2013.16.4.01<\/a>  <\/p>\n\n\n\n

Download PDF<\/a><\/p>\n\n\n\n

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Nanowires have attracted considerable interest as the nanoscale interconnects and as the moving elements of both electronic and electromechanical devices. The evaluation of nanomechanical property plays a significant role in the development of new nanowire-based devices. Recently, we are engaged in developing an easy method for nanomechanical measurement by using an in-plane-mode piezoresistive vibration sensor fabricated with less process cost and package difficulties. Theoretical analysis and simulation results suggested that the device is capable of high-sensitive and variety, and it is expected to evaluate mechanical properties of metallic or metallic oxide nanowires.<\/p>\n\n\n\n

Keywords: Nanowires, Mechanical Property, MEMS, Piezoresistive Sensor<\/em><\/p>\n\n\n\n

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